A System Based on Piezoelectric Micromachined Ultrasound Transducer for Social Distancing and Human-Machine Interaction

Ruan, T.; Wang, Q.; Xu, Q.; Yang, B.; Liu, J.

A Lead Zirconate Titanate (PZT) based piezoelectric Micromachined Ultrasound Transducer (pMUT) array designed, fabricated and used for real-time proximity detection is presented in this paper. One-dimensional pMUT array containing 192 elements (24 column, each column contains 8 elements) was fabricated in silicon substrate. The size of the pMUT array is 2 × 0.8mm2 and the resonant frequency of the pMUT elements is 7.54MHz. In order to get appropriate signal for data processing, back-end circuit is designed for the pMUT array in speciality. In the air, the distance of 15cm can be detected precisely and displayed on computer in real time and send an alarm at setting distance. This system suggests that pMUTs have sufficient performance for application in social distancing and human-machine interaction to avoid collision. © 2021 IEEE.