Piezoelectric MEMS Micro-Cantilever Biosensor for Detection of SARS-CoV2

Niranjan, A.; Gupta, P.; Rajoriya, M.

Piezoelectric MEMS (Micro-Electro-Mechanical Systems) are used in many applications now a day's including the diagnosis of diseases.COVID-19 is a pandemic recently affecting the entire world. Various techniques for detection are being used to date. Paper presents a simulation-based piezoelectric MEMS detection method for the virus, which is fast, portable, cost-effective, require less amount of sample, reliable, and can diagnose the stage for SARS-CoV-2(Severe acute respiratory syndrome corona virus 2) from the first day of virus infection. The design and analysis of cantilever-based MEMS biosensor is done COMSOL Multiphysics. Three cantilevers are used in the design, one each for viral load, IgM, and IgG. The bio-molecular reaction on the cantilever increases the mass at the end, changing the electrical and mechanical properties in the cantilever. Piezoelectric material generates the voltage proportional to the mass applied. From the values of voltage obtained from three cantilevers, the infection stage for symptomatic and asymptomatic can be diagnosed. Results show a linear relationship between the load applied and voltage generated. The proposed biosensor has a mass sensitivity of 20 copies /ml. © 2021 IEEE.